Superconducting Thin-Film Deposition Lab
Steele 33 is a lab dedicated to fabrication of superconducting circuits. It currently houses a Plassys electron beam evaporation tool for fabrication of Josephson Junctions (JJs) and is currently being renovated for a RF-magnetron sputtering system for depositing superconducting thin films such WSi and NbN.
Plassys MEB 550S evaporation system
load-lock and main chamber
Mr. Big Wrench