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Steele 33

Superconducting Thin-Film Deposition Lab

Steele 33 is a lab dedicated to fabrication of superconducting circuits. It currently houses a Plassys electron beam evaporation tool for fabrication of Josephson Junctions (JJs) and is currently being renovated for a RF-magnetron sputtering system for depositing superconducting thin films such WSi and NbN. 

Plassys MEB 550S evaporation system

 load-lock and main chamber

 controls rack

Mr. Big Wrench